Pulsed Laser Deposition

Pulsed laser deposition (PLD) is a physical vapor deposition technique. PLD is a conceptually very simple thin film growth technique, yet very powerful, as it can be used for a wide class of materials. A set of optics focuses a high-power pulsed-laser-beam inside a vacuum chamber, which houses a target of the material to be deposited and a substrate holder. The beam strikes the target and vaporizes it creating a so-called ablation plume. The plume invests the substrate and creates, pulse after pulse, layer after layer, the thin film. Interestingly, PLD allows for the deposition of either highly oriented or epitaxial films for both fundamental measurements and applications. In our lab, we have a deposition system for PLD produced by Neocera comprising a Surelite III, a Nd-YAG pulsed-laser by Continuum.

We have utilized PLD to deposit single and polycrystalline films of various perovskite oxides. The study of this class of ceramics is motivated by their interest in numerous fields, not last the realm of solid oxide fuel cells electrodes.


[1] D. Chen, C. Chen, Y. Gao, Z. Zhang, Z. Shao, and F. Ciucci. Evaluation of Pulsed Laser Deposited SrNb0.1Co0.9O3-δ Thin Films as Promising Cathodes for Intermediate-Temperature Solid Oxide Fuel Cells.Journal of Power Sources, 295, 117-124 (2015) link

[2] C. Chen, D. Chen, Y. Gao, Z. Shao, and F. Ciucci. Computational and Experimental Analysis of Ba0.95La0.05FeO3−δ as a Cathode Material for Solid Oxide Fuel Cells. Journal of Materials Chemistry A, 2, 14154-14163 (2014) link

[3] D. Chen, C. Chen, F. Dong, Z. Shao, and F. Ciucci. Cobalt-Free Polycrystalline Ba0.95La0.05FeO3−δ Thin Films as Cathodes for Intermediate-Temperature Solid Oxide Fuel Cells. Journal of Power Sources, 250,188-195 (2014) link

[4] Y. Gao, D. Chen, C. Chen, Z. Shao, and F. Ciucci. Oriented PrBaCo2O5+δ Thin Films for Solid Oxide Fuel Cells. Journal of Power Sources, 278, 623-629 (2015) link